Scanning Electron Microscopes

Hitachi SU8010 Cold Field Emission SEM
Location: Room 181, IPST Bldg

Please contact Tim Zhang for training 


 1.0  nm resolution( Secondary electron detector) at 15 kV and 1.3 nm at 1 kV 

2.0nm resolution(Backscattered electron detector) at 15KV 

Operating voltage range 100 V – 30 kV 

High resolution image grabber up to 5120X3840 pixels. 

Ultra-clean vacuum system with a turbo pump and an oil free dry-scroll pump. 

A stationary anti-contamination trap reduce the re-deposition of hydrocarbons onto the sample surface



- Operating Instructions





LEO 1530 thermally-assisted field emission (TFE) scanning electron microscope (SEM)

Location: room 176, IPST Bldg.

State-of-the-art; 1 nm resolution at 20 kV and 3 nm at 1 kV operating voltage range 200 V – 30 kV
large specimen chamber and eucentric stage
thin window SSD energy dispersive spectrometer (EDS), for microanalysis of elements down to Boron. 

- Operating Instructions